Hot Plate

Product Details:

The Hotplate HP-150 was developed for typical soft bake and hard bake processes in lithography, in MEMS and similar applications. The temperature range is designed for up to 250°Cby default. The set temperature and the temperature profile have narrow margins, meaningthat a high coating quality can be achieved. The HP series is convincing due to its high level ofuniformity and the high-precision process repeatability. It can be used for substrates with adiameter of up to 150mm and thicknesses of 5mm at maximum.The hotplate is covered with safety glass, which makes cleaning easier. Due to the highquality and robust design and easy handling, SAWATEC hotplates are preferentially used forlaboratories, R&D, pilot projects and institutes.The high-precision, good value instruments are available both as portable bench-top andbench-mounted units.FEATURES (BASIC CONFIGURATION)Temperature control with digital target and actual value displayAutomatic temperature limit switch, no overheatingHotplate with safety glass, easy cleaningEasy levelling of the hotplate, prevents discharge of photoresistManual substrate fixation via vacuumManual loading and unloading of the substrates